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Possibility of determination of parameters of nanolayers by the modified Kretchman's scheme.

Authors :
Karpenko, Valery A.
Romanenko, Aleksei A.
Source :
Proceedings of SPIE; Nov2002, Issue 1, p187-191, 5p
Publication Year :
2002

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65671164
Full Text :
https://doi.org/10.1117/12.464472