Back to Search
Start Over
Edge determination for polycrystalline silicon lines on gate oxide.
- Source :
- Proceedings of SPIE; Nov2001, Issue 1, p147-156, 10p
- Publication Year :
- 2001
Details
- Language :
- English
- ISSN :
- 0277786X
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 65606293
- Full Text :
- https://doi.org/10.1117/12.436738