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Modeling of optical mirror and electromechanical behavior.

Authors :
Wang, Fang
Lu, Chao
Liu, Zishun
Liu, Ai Q.
Zhang, Xu M.
Source :
Proceedings of SPIE; Nov2001, Issue 1, p95-105, 11p
Publication Year :
2001

Details

Language :
English
ISSN :
0277786X
Issue :
1
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
65598800
Full Text :
https://doi.org/10.1117/12.445082