Nanoscale fabrication using single-ion impacts.

MLA

Millar, Victoria, et al. “Nanoscale Fabrication Using Single-Ion Impacts.” Proceedings of SPIE, no. 1, Nov. 2001, pp. 173–78. EBSCOhost, https://doi.org/10.1117/12.454601.

APA

Millar, V., Pakes, C. I., Cimmino, A., Brett, D., Jamieson, D. N., Prawer, S. D., Yang, C., Rout, B., McKinnon, R. P., Dzurak, A. S., & Clark, R. G. (2001). Nanoscale fabrication using single-ion impacts. Proceedings of SPIE, 1, 173–178. https://doi.org/10.1117/12.454601

Chicago

Millar, Victoria, Chris I. Pakes, Alberto Cimmino, David Brett, David N. Jamieson, Steven D. Prawer, Changyi Yang, et al. 2001. “Nanoscale Fabrication Using Single-Ion Impacts.” Proceedings of SPIE, no. 1 (November): 173–78. doi:10.1117/12.454601.