Improved thermal stability of sputtered W/C multilayer thin films.

MLA

Gonzalez-Hernandez, Jesus, et al. “Improved Thermal Stability of Sputtered W/C Multilayer Thin Films.” Proceedings of SPIE, no. 1, Nov. 1993, pp. 646–59. EBSCOhost, https://doi.org/10.1117/12.140608.

APA

Gonzalez-Hernandez, J., Chao, B. S., Chan, A. R., Gavulic, J. M., Ovshinsky, S. R., & Wood, J. L. (1993). Improved thermal stability of sputtered W/C multilayer thin films. Proceedings of SPIE, 1, 646–659. https://doi.org/10.1117/12.140608

Chicago

Gonzalez-Hernandez, Jesus, Benjamin S. Chao, A. R. Chan, J. M. Gavulic, Stanford R. Ovshinsky, and James L. Wood. 1993. “Improved Thermal Stability of Sputtered W/C Multilayer Thin Films.” Proceedings of SPIE, no. 1 (November): 646–59. doi:10.1117/12.140608.