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Fabrication and characterization of a novel microvalve for microfluidic applications.
- Source :
- Journal of Micro/Nanolithography, MEMS & MOEMS; Jul2004, Vol. 3 Issue 3, p486-492, 7p
- Publication Year :
- 2004
Details
- Language :
- English
- ISSN :
- 19325150
- Volume :
- 3
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Micro/Nanolithography, MEMS & MOEMS
- Publication Type :
- Academic Journal
- Accession number :
- 65460539
- Full Text :
- https://doi.org/10.1117/1.1759329