Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology.

Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact physics. Experimental measurements are obtained to characterize the response of a 5-µm [ABSTRACT FROM AUTHOR]