Dual-Source Atmospheric Pressure CVD of Amorphous Molybdenum Phosphide Films on Glass Using Molybdenum( V) Chloride and Cyclohexylphosphine.

Details

Language :

English

ISSN :

09481907

Volume :

9

Issue :

1

Database :

Complementary Index

Journal :

Chemical Vapor Deposition

Publication Type :

Academic Journal

Accession number :

64970443

Full Text :

https://doi.org/10.1002/cvde.200290000