Growth of Trumpet-Like Protrusions During the CVD of Silicon Carbide Films.

Details

Language :

English

ISSN :

09481907

Volume :

8

Issue :

2

Database :

Complementary Index

Journal :

Chemical Vapor Deposition

Publication Type :

Academic Journal

Accession number :

64970402

Full Text :

https://doi.org/10.1002/1521-3862(20020304)8:2<52::AID-CVDE52>3.0.CO;2-R