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CVD of GaN Films on Si(111). Chemically Clean Decomposition of Et2Ga(N3)·MeHNNH2.

Authors :
Sung, M. M.
Kim, C.
Yoo, S. H.
Kim, C. G.
Kim, Y.
Source :
Chemical Vapor Deposition; Mar2002, Vol. 8 Issue 2, p50-52, 3p
Publication Year :
2002

Details

Language :
English
ISSN :
09481907
Volume :
8
Issue :
2
Database :
Complementary Index
Journal :
Chemical Vapor Deposition
Publication Type :
Academic Journal
Accession number :
64970399
Full Text :
https://doi.org/10.1002/1521-3862(20020304)8:2<50::AID-CVDE50>3.0.CO;2-2