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ChemInform Abstract: Room Temperature Chemical Vapor Deposition SiOF Film Formation Technology for the Interlayer in Submicron Multilevel Interconnections.
- Source :
- ChemInform; Jul1993, Vol. 24 Issue 27, pno-no, 1p
- Publication Year :
- 1993
Details
- Language :
- English
- ISSN :
- 09317597
- Volume :
- 24
- Issue :
- 27
- Database :
- Complementary Index
- Journal :
- ChemInform
- Publication Type :
- Academic Journal
- Accession number :
- 64548904
- Full Text :
- https://doi.org/10.1002/chin.199327020