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Growth of (103) fiber-textured SrBi[sub 2]Nb[sub 2]O[sub 9] films on Pt-coated silicon.
- Source :
- Applied Physics Letters; 4/1/2002, Vol. 80 Issue 13, p2371, 3p, 3 Diagrams, 2 Graphs
- Publication Year :
- 2002
-
Abstract
- (103) fiber-textured SrBi[sub 2]Nb[sub 2]O[sub 9] thin films have been grown on Pt-coated Si substrates using a SrRuO[sub 3] buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) SrRuO[sub 3] grains on (111) Pt grains and in turn (103) SrBi[sub 2]Nb[sub 2]O[sub 9] grains on (111) SrRuO[sub 3] grains. The films exhibit remanent polarization values of 9 µC/cm². The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures. [ABSTRACT FROM AUTHOR]
- Subjects :
- STRONTIUM compounds
THIN films
SILICON
PLATINUM
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 80
- Issue :
- 13
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 6391197
- Full Text :
- https://doi.org/10.1063/1.1463697