Materials for multilevel resist schemes.

MLA

Reichmanis, E., et al. “Materials for Multilevel Resist Schemes.” Polymer Engineering & Science, vol. 23, no. 18, Dec. 1983, pp. 1039–42. EBSCOhost, https://doi.org/10.1002/pen.760231812.

APA

Reichmanis, E., Wilkins, C. W., & Ong, E. (1983). Materials for multilevel resist schemes. Polymer Engineering & Science, 23(18), 1039–1042. https://doi.org/10.1002/pen.760231812

Chicago

Reichmanis, E., C. W. Wilkins, and E. Ong. 1983. “Materials for Multilevel Resist Schemes.” Polymer Engineering & Science 23 (18): 1039–42. doi:10.1002/pen.760231812.