Thermally-reacted poly(methacrylamide) as a positive electron beam resist.

Details

Language :

English

ISSN :

00323888

Volume :

17

Issue :

6

Database :

Complementary Index

Journal :

Polymer Engineering & Science

Publication Type :

Academic Journal

Accession number :

62420594

Full Text :

https://doi.org/10.1002/pen.760170616