Solubility of carbon dioxide and cosolvents in a photoresist polymer.

Authors :: Balashova, Ida M.
Russell, Marc C.
Danner, Ronald P.
Duda, J. Larry
Source :: Journal of Applied Polymer Science; May2008, Vol. 108 Issue 3, p1865-1870, 6p
Publication Year :: 2008
Abstract: This article discusses a study which examined the solubility and diffusivity of cosolvents and carbon dioxide in a photoresist polymer. The study used the inverse gas chromatography and static capsule methods in measuring the solubility and diffusivity of the materials. It revealed an increase in the solubility and diffusivity of the cosolvents due to the presence of low pressures of carbon dioxide.