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Microstructure and Pattern Size Dependence of Copper Corrosion in Submicron-Scale Features.

Authors :
Ui-hyoung Lee
Hyoung Jin Jeon
Tak Kang
Hun-Joon Sohn
Kyu Hwan Oh
Eun Kyu Her
Heung Nam Han
Lee, H. W.
Insoo Kim
Donggyu Kim
Sung-Keun Lee
Hyo-Jong Lee
Source :
Journal of The Electrochemical Society; 2011, Vol. 158 Issue 5, pD298-D301, 4p, 9 Graphs
Publication Year :
2011

Details

Language :
English
ISSN :
00134651
Volume :
158
Issue :
5
Database :
Complementary Index
Journal :
Journal of The Electrochemical Society
Publication Type :
Academic Journal
Accession number :
62034197
Full Text :
https://doi.org/10.1149/1.3562204