Nano-beam electron diffraction evaluation of strain behaviour in nano-scale patterned strained silicon-on-insulator.

Details

Language :

English

ISSN :

18626351

Volume :

8

Issue :

4

Database :

Complementary Index

Journal :

Physica Status Solidi (C)

Publication Type :

Academic Journal

Accession number :

59789769

Full Text :

https://doi.org/10.1002/pssc.201084007