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Nano-beam electron diffraction evaluation of strain behaviour in nano-scale patterned strained silicon-on-insulator.

Authors :
Hähnel, Angelika
Reiche, Manfred
Moutanabbir, Oussama
Blumtritt, Horst
Geisler, Holm
Hoentschel, Jan
Engelmann, Hans-Jürgen
Source :
Physica Status Solidi (C); Apr2011, Vol. 8 Issue 4, p1319-1324, 6p
Publication Year :
2011

Details

Language :
English
ISSN :
18626351
Volume :
8
Issue :
4
Database :
Complementary Index
Journal :
Physica Status Solidi (C)
Publication Type :
Academic Journal
Accession number :
59789769
Full Text :
https://doi.org/10.1002/pssc.201084007