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Self-organized antireflecting nano-cone arrays on Si (100) induced by ion bombardment.
- Source :
- Journal of Applied Physics; Mar2011, Vol. 109 Issue 5, p053513, 5p, 2 Black and White Photographs, 1 Diagram, 1 Chart, 2 Graphs
- Publication Year :
- 2011
-
Abstract
- Self-organized nano-cone arrays are fabricated on Si (100) by means of Ar+ ion bombardment at normal incidence with ion energy of 1.5 keV and current density of 1000 µA cm-2. The nano-structured Si surface appears black as seen by the naked eye. The measured reflectance of the surface is less than 11% over the wavelength range from 350 to 2000 nm as compared to that of >∼30% for the polished Si. An enhancement of more than 25% in absorption is observed in this region. The cones are densely distributed over the surface with an average height of ∼350 nm and base width of ∼250 nm. Incorporation of metal atoms such as Fe and Cr is found to be mandatory for the formation of the nano-structures during ion bombardment. High-resolution electron spectra show that for each cone, the apex is metal-enriched, and the rest is nearly free of metal atoms, showing good crystallinity with the same crystallographic orientation as the substrate. [ABSTRACT FROM AUTHOR]
- Subjects :
- NANOSTRUCTURED materials
SILICON
ION bombardment
ATOMS
ELECTRON spectroscopy
METALS
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 109
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 59308855
- Full Text :
- https://doi.org/10.1063/1.3560539