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Hollow waveguides with low intrinsic photoluminescence fabricated with Ta2O5 and SiO2 films.
- Source :
- Applied Physics Letters; 2/28/2011, Vol. 98 Issue 9, p091104, 3p
- Publication Year :
- 2011
-
Abstract
- A type of integrated hollow core waveguide with low intrinsic photoluminescence fabricated with Ta<subscript>2</subscript>O<subscript>5</subscript> and SiO<subscript>2</subscript> films is demonstrated. Hollow core waveguides made with a combination of plasma-enhanced chemical vapor deposition SiO<subscript>2</subscript> and sputtered Ta<subscript>2</subscript>O<subscript>5</subscript> provide a nearly optimal structure for optofluidic biofluorescence measurements with low optical loss, high fabrication yield, and low background photoluminescence. Compared to earlier structures made using Si<subscript>3</subscript>N<subscript>4</subscript>, the photoluminescence background of Ta<subscript>2</subscript>O<subscript>5</subscript> based hollow core waveguides is decreased by a factor of 10 and the signal-to-noise ratio for fluorescent nanobead detection is improved by a factor of 12. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 98
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 58844849
- Full Text :
- https://doi.org/10.1063/1.3561749