Novel Nanophase-Switching ESD Protection.

This letter reports the proof-of-concept results for the new nontraditional nanophase-switching electrostatic-discharge (ESD) protection mechanism and nanocrossbar ESD structures. Experiment shows good ESD switching and protection, i.e., a fast response of 100 ps, a ultralow leakage of 0.26 pA, and an ESD protection of >\267\ \V/\mu\m^2. A new dispersed local ESD tunneling model is proposed, and heterogeneous complementary metal–oxide–semiconductor integration is developed. [ABSTRACT FROM PUBLISHER]