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Guest Editorial Equipment and Operations Automation in the Semiconductor Industry.

Authors :
Morrison, James R.
Chien, Chen-Fu
Dauzère-Pérès, Stéphane
Dawande, Milind
Ding, Han
Pettinato, Jeffrey S.
Yi, Jingang
Source :
IEEE Transactions on Automation Science & Engineering; 01/01/2011, Vol. 8 Issue 1, p1-4, 4p
Publication Year :
2011

Details

Language :
English
ISSN :
15455955
Volume :
8
Issue :
1
Database :
Complementary Index
Journal :
IEEE Transactions on Automation Science & Engineering
Publication Type :
Academic Journal
Accession number :
57252951
Full Text :
https://doi.org/10.1109/TASE.2010.2078870