Back to Search
Start Over
Guest Editorial Equipment and Operations Automation in the Semiconductor Industry.
- Source :
- IEEE Transactions on Automation Science & Engineering; 01/01/2011, Vol. 8 Issue 1, p1-4, 4p
- Publication Year :
- 2011
Details
- Language :
- English
- ISSN :
- 15455955
- Volume :
- 8
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Automation Science & Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 57252951
- Full Text :
- https://doi.org/10.1109/TASE.2010.2078870