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Quantitative Assessment of TEM-Sample Warping Caused by FIB Preparation.

Authors :
Salzer, R.
Graff, A.
Simon, M.
Altmann, F.
Source :
Microscopy & Microanalysis; Jul2010 Supplement, Vol. 16 Issue S2, p172-173, 2p
Publication Year :
2010

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010. [ABSTRACT FROM PUBLISHER]

Subjects

Subjects :
FOCUSED ion beams

Details

Language :
English
ISSN :
14319276
Volume :
16
Issue :
S2
Database :
Complementary Index
Journal :
Microscopy & Microanalysis
Publication Type :
Academic Journal
Accession number :
56861173
Full Text :
https://doi.org/10.1017/S1431927610061787