Back to Search
Start Over
Electron detection performance of diamond avalanche diode.
- Source :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2010, Vol. 28 Issue 6, p1169-1172, 4p
- Publication Year :
- 2010
-
Abstract
- The authors evaluated the electron detection performance of a diamond avalanche diode (DAD) detector. In the electrode region, the gain was uniformly about 10<superscript>3</superscript> with little noise. Meanwhile, an avalanche multiplication occurred locally. In the avalanche region, a total gain of 5×10<superscript>4</superscript> was obtained. In some regions where the electric field is regarded to be intensified, the avalanche multiplication gain was estimated to be approximately 100-300, and the signal-to-noise ratio (S/N) was nearly equal to 1. The DAD can be applied to an electron detector for a scanning electron microscope due to its high gain and small dark current. However, it is necessary to improve the S/N and homogenize the gain to use the DAD detector as an electron detector. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 21662746
- Volume :
- 28
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 55563292
- Full Text :
- https://doi.org/10.1116/1.3497031