Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence.

Authors :: Gregoire, John M.
Dale, Darren
Kazimirov, Alexander
DiSalvo, Francis J.
Bruce van Dover, R.
Source :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2010, Vol. 28 Issue 5, p1279-1280, 2p, 2 Graphs
Publication Year :: 2010
Abstract: We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent. [ABSTRACT FROM AUTHOR]

Subjects :: SPUTTERING (Physics)
X-ray spectroscopy
THIN films
POWER resources
VACUUM technology

Language :: English
ISSN :: 07342101
Volume :: 28
Issue :: 5
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :: Academic Journal
Accession number :: 53422234
Full Text :: https://doi.org/10.1116/1.3478668

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