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Development of high-performance polycrystalline silicon thin-film transistors (TFTs) using defect control process technologies.
- Source :
- IEEE Electron Device Letters; Jul2002, Vol. 23 Issue 7, p407-409, 3p
- Publication Year :
- 2002
Details
- Language :
- English
- ISSN :
- 07413106
- Volume :
- 23
- Issue :
- 7
- Database :
- Complementary Index
- Journal :
- IEEE Electron Device Letters
- Publication Type :
- Academic Journal
- Accession number :
- 52002109
- Full Text :
- https://doi.org/10.1109/LED.2002.1015218