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Development of high-performance polycrystalline silicon thin-film transistors (TFTs) using defect control process technologies.

Authors :
Higashi, S.
Abe, D.
Hiroshima, Y.
Miyashita, K.
Kawamura, T.
Inoue, S.
Shimoda, T.
Source :
IEEE Electron Device Letters; Jul2002, Vol. 23 Issue 7, p407-409, 3p
Publication Year :
2002

Details

Language :
English
ISSN :
07413106
Volume :
23
Issue :
7
Database :
Complementary Index
Journal :
IEEE Electron Device Letters
Publication Type :
Academic Journal
Accession number :
52002109
Full Text :
https://doi.org/10.1109/LED.2002.1015218