Properties of nanosized carbon coatings doped with nitrogen, tungsten, and aluminium and obtained by pulse vacuum arc method.

Results of investigations into the properties of nanosized carbon coatings doped with nitrogen, tungsten, and aluminium and obtained on silicon by the pulse vacuum arc method are discussed. The doping effect on internal stress values, microhardness, and surface morphology was studied. It has been established that doping nanosized carbon coatings with nitrogen, tungsten, and aluminium makes it possible affect their internal stress values, surface morphology, and the strength properties of the substrate-coating system. [ABSTRACT FROM AUTHOR]