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Characterization of SnO2-based H2 gas sensors fabricated by different deposition techniques.

Authors :
ANSARI, S.
GOSAVI, S.
GANGAL, S.
KAREKAR, R.
AIYER, R.
Source :
Journal of Materials Science: Materials in Electronics; Feb1997, Vol. 8 Issue 1, p23-27, 5p
Publication Year :
1997

Abstract

Thick and thin films of SnO2 are extensively used for resistive gas sensors. Characteristics are compared for films produced by four different techniques – chemical vapour deposition (CVD), spray pyrolysis, vacuum evaporation and screen printing. The films are characterized for H2 sensing only, using a static measurement system to investigate their temperature selectivity. The samples are tested at a concentration of 300 p.p.m. H2 gas, a typical value for comparison. No selective peak is observed for CVD and spray deposited samples, and the selective peak for vacuum evaporated samples has a low sensitivity. But the selective peak for screen printed samples has a sensitivity of 55% (δR/Rair). And what is more, the screen printed samples have a repeatable response. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09574522
Volume :
8
Issue :
1
Database :
Complementary Index
Journal :
Journal of Materials Science: Materials in Electronics
Publication Type :
Academic Journal
Accession number :
50043378
Full Text :
https://doi.org/10.1023/A:1018544702391