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Characterization of SnO2-based H2 gas sensors fabricated by different deposition techniques.
- Source :
- Journal of Materials Science: Materials in Electronics; Feb1997, Vol. 8 Issue 1, p23-27, 5p
- Publication Year :
- 1997
-
Abstract
- Thick and thin films of SnO2 are extensively used for resistive gas sensors. Characteristics are compared for films produced by four different techniques – chemical vapour deposition (CVD), spray pyrolysis, vacuum evaporation and screen printing. The films are characterized for H2 sensing only, using a static measurement system to investigate their temperature selectivity. The samples are tested at a concentration of 300 p.p.m. H2 gas, a typical value for comparison. No selective peak is observed for CVD and spray deposited samples, and the selective peak for vacuum evaporated samples has a low sensitivity. But the selective peak for screen printed samples has a sensitivity of 55% (δR/Rair). And what is more, the screen printed samples have a repeatable response. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09574522
- Volume :
- 8
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of Materials Science: Materials in Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 50043378
- Full Text :
- https://doi.org/10.1023/A:1018544702391