A method to correct defocused element distribution maps in electron probe microanalysis.

Element distribution maps obtained on electron microprobes via the beam scan method with wavelength-dispersive spectrometers reveal a defocusing effect if they are taken at sufficiently small magnification. This effect, which occurs where the Bragg condition of the spectrometer is not adequately met, can be avoided or corrected by various methods. A method is presented here to correct defocused element distribution maps with the help of corresponding maps obtained on homogeneous standards. [ABSTRACT FROM AUTHOR]