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Graded composition and valence states in self-forming barrier layers at Cu–Mn/SiO2 interface.
- Source :
- Applied Physics Letters; 1/4/2010, Vol. 96 Issue 1, p012101, 3p, 1 Diagram, 3 Graphs
- Publication Year :
- 2010
-
Abstract
- A self-forming diffusion barrier (SFB) layer was formed at Cu–Mn/SiO<subscript>2</subscript> interface. Spatial variation of the chemical composition and valence state of the elements in the SFB was investigated in a subnanometer resolution using electron energy loss spectroscopy and transmission electron microscopy. The SFB was found to have a layered structure with graded compositions of nanocrystalline MnO and amorphous MnSiO<subscript>3</subscript>. The valence state of Mn was found to be +2 in the MnO layer and gradually increased to +3 in the MnSiO<subscript>3</subscript> layer. The reported dielectric constant of the SFB could be explained by the observed composition and microstructure. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 96
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 47416490
- Full Text :
- https://doi.org/10.1063/1.3269602