Capacitance humidity sensor with carbon nitride detecting element.

Abstract. The humidity sensitive properties of carbon nitride (CN[sub X]) films deposited by two methods, inductively coupled plasma chemical vapour deposition utilizing transport reactions and pulsed laser deposition combined with an rf discharge, have been investigated. For this purpose capacitance humidity sensors with a CN[sub X] detecting element have been fabricated and tested. Fast and significant responses toward moisture am registered by the changes of the electrical parameters. The CN[sub X] films sensing mechanism has been discussed. The results obtained show unambiguously that CN[sub X] films appear to be a promising candidate as a humidity sensitive element in up-to-date electronic noses. [ABSTRACT FROM AUTHOR]