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X-ray diffraction studies of the effects of N incorporation in amorphous CNx materials.
- Source :
- Journal of Applied Physics; 4/1/1998, Vol. 83 Issue 7, p3529, 6p, 2 Charts, 3 Graphs
- Publication Year :
- 1998
-
Abstract
- Details the X-ray diffraction study of the effects of N incorporation in amorphous CNx materials. Observations made in study; Use of experimental data in study; Indications of the results of study; What results of study are consistent with.
- Subjects :
- AMORPHOUS substances
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 83
- Issue :
- 7
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 471458
- Full Text :
- https://doi.org/10.1063/1.366566