Back to Search
Start Over
Special Section on the International Symposium on Semiconductor Manufacturing.
- Source :
- IEEE Transactions on Semiconductor Manufacturing; Nov2009, Vol. 22 Issue 4, p417-418, 2p, 2 Black and White Photographs
- Publication Year :
- 2009
-
Abstract
- Information about the 17th International Symposium on Semiconductor Manufacturing held in Tokyo, Japan from October 27 to 29, 2008 is presented. Highlights include the discussion on the yield enhancement and clean technology, which has been considered an essential technical area of semiconductor manufacturing. Further, it was also said to have given emphasis on the new dry and wet combined equipment having the capacity of addressing the issues on process performance and cost-control.
- Subjects :
- CONFERENCES & conventions
SEMICONDUCTOR industry
MANUFACTURING processes
Subjects
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 22
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- 45591992
- Full Text :
- https://doi.org/10.1109/TSM.2009.2031745