Stability of thin film transistors incorporating a zinc oxide or indium zinc oxide channel deposited by a high rate sputtering process.

A novel rf sputtering technology in which a high density plasma is created in a remote chamber has been used to reactively deposit zinc oxide (ZnO) and indium zinc oxide (IZO) thin films at room temperature from metallic sputtering targets at deposition rates [?]50 nm min[?]1, which is approximately an order of magnitude greater than that of rf magnetron sputtering. Thin film transistors have been fabricated using IZO with a maximum processing temperature of 120 degC, which is defined by the curing of the photoresist used in patterning. Devices have a saturated field effect mobility of 10 cm2 V[?]1 s[?]1 and a switching ratio in excess of 106. Gate bias stress experiments performed at elevated temperatures show a consistent apparent increase in the field effect mobility with time, which is attributed to a charge trapping phenomenon. [ABSTRACT FROM AUTHOR]