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Effect of oxygen on boron doping in chemical vapor deposition of diamond as deduced from....
- Source :
- Applied Physics Letters; 4/13/1992, Vol. 60 Issue 15, p1884, 3p, 3 Graphs
- Publication Year :
- 1992
-
Abstract
- Investigates the effect of oxygen on boron doping in diamond thin films. Growth of diamond film using microwave-plasma enhanced chemical vapor deposition; Application of cathodoluminescence for analysis of deposited film; Characterization of film by scanning electron microscopy and Raman scattering; Variation of boron concentration in film doped with oxygen.
- Subjects :
- OXYGEN
DIAMOND thin films
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 60
- Issue :
- 15
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4250504
- Full Text :
- https://doi.org/10.1063/1.107143