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Influence of target-substrate angle on the elemental concentration of c-axis...
- Source :
- Applied Physics Letters; 9/13/1999, Vol. 75 Issue 11, p1589, 3p, 6 Black and White Photographs, 7 Graphs
- Publication Year :
- 1999
-
Abstract
- Studies the influence of target-substrate angle on the elemental concentration of thin films. Indications of the thermalization processes in sputtering; Common materials characterization techniques of scanning electron microscopy, x-ray diffraction, transport measurements and conventional Rutherford backscattering spectrometry.
- Subjects :
- THIN films
ELECTRON microscopy
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 75
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 4211948
- Full Text :
- https://doi.org/10.1063/1.124763