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Guest Editorial.
- Source :
- IEEE Transactions on Industrial Electronics; Apr2009, Vol. 56 Issue 4, p911-912, 2p
- Publication Year :
- 2009
-
Abstract
- The article discusses various reports published within the issue, including the reviews on the development of microelectromechanical systems (MEMS) by Dean and Luque, new numerical method to predict the results obtained when using electron-beam lithography by Chen and Yeh, and reports on transmission lines built in alumina on a silicon substrate by Li and Uttamchandani.
- Subjects :
- MICROELECTROMECHANICAL systems
ELECTRON beam lithography
Subjects
Details
- Language :
- English
- ISSN :
- 02780046
- Volume :
- 56
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Industrial Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 40305936
- Full Text :
- https://doi.org/10.1109/TIE.2009.2014679