Anatomy of ...c-Si thin films by plasma enhanced chemical vapor deposition: An investigation by spectroscopic ellipsometry.

Reports on the performance of a detailed analysis of the anatomy of microcrystalline films deposited by plasma enhanced chemical vapor deposition from both SiF[sub 4]-H[sub 2] and SiH[sub 4]-H[sub 2] mixtures. Discrimination of the complex structure of microcentimeter-Si thin films by spectroscopic ellipsometry; Effect of the precursors on the growth dynamics.