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Properties of MIS Capacitors Using the Atomic-Layer-Deposited ZnO Semiconductor and Al2O3 Insulator.

Authors :
Jaewon Song
Him Chan Oh
Tae Joo Park
Cheol Seong Hwang
Sang-Hee Ko Park
Sung Min Yoon
Chi-Sun Hwang
Source :
Journal of The Electrochemical Society; 2008, Vol. 155 Issue 11, pH858-H863, 6p, 2 Diagrams, 7 Graphs
Publication Year :
2008

Details

Language :
English
ISSN :
00134651
Volume :
155
Issue :
11
Database :
Complementary Index
Journal :
Journal of The Electrochemical Society
Publication Type :
Academic Journal
Accession number :
34997344
Full Text :
https://doi.org/10.1149/1.2971024