Comparative x-ray reflectometry and atomic force microscopy of surfaces with non-Gaussian roughness.

Theoretical and experimental investigations have been carried out with the aim of comparing atomic force microscopy (AFM) and x-ray reflectometry (XRR) as methods for characterizing surface roughness. It is shown that AFM gives more appropriate information about the surface roughness in comparison to XRR. The method for estimating the parameters that characterize x-ray scattering on the basis of AFM data is developed. [ABSTRACT FROM AUTHOR]