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Special Section on the International Conference on Microelectronic Test Structures.
- Source :
- IEEE Transactions on Semiconductor Manufacturing; May2008, Vol. 21 Issue 2, p131-131, 1p, 1 Black and White Photograph
- Publication Year :
- 2008
-
Abstract
- Information about the 19th International Conference on Microelectronic Test Structures (ICMTS) held in Austin, Texas in 2006 is presented. There were over 40 regular papers presented in nine sessions at the meeting. The papers feature work directed to furthering the understanding of systematic and parametric yield loss characteristics of complementary metal oxide semiconductors (CMOS) to microelectromechanical systems (MEMS).
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 21
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- 34042448
- Full Text :
- https://doi.org/10.1109/TSM.2008.2000313