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Diffusion of Ge in Si1-xGex/Si single quantum wells in inert and oxidizing ambients.

Authors :
Griglione, Michelle
Anderson, Timothy J.
Law, Mark E.
Jones, Kevin S.
van den Bogaard, Alex
Source :
Journal of Applied Physics; 8/1/2000, Vol. 88 Issue 3, p1366, 7p, 1 Black and White Photograph, 2 Diagrams, 3 Charts, 4 Graphs
Publication Year :
2000

Abstract

Studies the interdiffusion of Si/Si0.85Ge0.15/Si single quantum well structures subjected to inert- and oxidizing-ambient annealing. Extraction of diffusion coefficients; Similarity in diffusion profiles of samples processed.

Subjects

Subjects :
QUANTUM wells
DIFFUSION

Details

Language :
English
ISSN :
00218979
Volume :
88
Issue :
3
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
3396528
Full Text :
https://doi.org/10.1063/1.373825