Conversion efficiencies of electron beam energy to vacuum ultraviolet light for Ne, Ar, Kr, and Xe excited with continuous electron beams.

Continuous 8–15 keV electron beams were used to excite Ne, Ar, Kr, and Xe at pressures ranging from 75 to 1400 hPa. Conversion efficiencies of the energy deposited by the electron beam in the gas to vacuum ultraviolet light emitted from excimers are obtained. At pressures above 500 hPa, the efficiencies show constant values of 0.31±0.06 for Ne, 0.33±0.04 for Ar, 0.42±0.05 for Kr, and 0.42±0.05 for Xe. Apparent energy conversion efficiencies for practical devices utilizing this excitation technique are also reported. [ABSTRACT FROM AUTHOR]