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Optical properties of Si clusters and Si noncrystallites in high-temperature annealed SiOx films.

Authors :
Inokuma, T.
Wakayama, Y.
Muramoto, T.
Aoki, R.
Kurata, Y.
Hasegawa, S.
Source :
Journal of Applied Physics; 2/15/1998, Vol. 83 Issue 4, p2228, 7p, 4 Black and White Photographs, 1 Chart, 7 Graphs
Publication Year :
1998

Abstract

Provides information on an experiment investigating the structure, optical absorption and photoluminescence (PL) properties of SiOx films subjected to thermal annealing at 750-1100...C. Methodology used to conduct the experiment; Information on Optical absorption; Results of the experiment.

Subjects

Subjects :
PHOTOLUMINESCENCE

Details

Language :
English
ISSN :
00218979
Volume :
83
Issue :
4
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
270027
Full Text :
https://doi.org/10.1063/1.366961