Comparison Of Several Metrology Techniques For In-line Process Monitoring Of Porous SiOCH.

MLA

Fossati, D., et al. “Comparison Of Several Metrology Techniques For In-Line Process Monitoring Of Porous SiOCH.” AIP Conference Proceedings, vol. 931, no. 1, Sept. 2007, pp. 362–66. EBSCOhost, https://doi.org/10.1063/1.2799399.

APA

Fossati, D., Beitia, C., Yu, L., Plantier, L., Imbert, G., Volpi, F., & Royer, J.-C. (2007). Comparison Of Several Metrology Techniques For In-line Process Monitoring Of Porous SiOCH. AIP Conference Proceedings, 931(1), 362–366. https://doi.org/10.1063/1.2799399

Chicago

Fossati, D., C. Beitia, L. Yu, L. Plantier, G. Imbert, F. Volpi, and J.-C. Royer. 2007. “Comparison Of Several Metrology Techniques For In-Line Process Monitoring Of Porous SiOCH.” AIP Conference Proceedings 931 (1): 362–66. doi:10.1063/1.2799399.