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Ion beam mass spectrometer ,for compositional analysis of plasma assisted surface processes in the pressure range of 1-50 mbar

Authors :
Katai, Sz.
Tass, Z.
Bori, L.
Hars, Gy.
Deak, P.
Geelhaar, L.
Source :
Review of Scientific Instruments; Aug1999, Vol. 70 Issue 8, p3324, 5p, 1 Diagram, 4 Graphs
Publication Year :
1999

Abstract

Employs the ion beam mass spectrometer to study chemical vapor deposition plasmas. Measurement of the ion composition and the ion energy distribution of the plasma in the immediate vicinity of the substrate surface; Construction and technical performance of the system; Components of the spectrometer.

Details

Language :
English
ISSN :
00346748
Volume :
70
Issue :
8
Database :
Complementary Index
Journal :
Review of Scientific Instruments
Publication Type :
Academic Journal
Accession number :
2484352