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Ion beam mass spectrometer ,for compositional analysis of plasma assisted surface processes in the pressure range of 1-50 mbar
- Source :
- Review of Scientific Instruments; Aug1999, Vol. 70 Issue 8, p3324, 5p, 1 Diagram, 4 Graphs
- Publication Year :
- 1999
-
Abstract
- Employs the ion beam mass spectrometer to study chemical vapor deposition plasmas. Measurement of the ion composition and the ion energy distribution of the plasma in the immediate vicinity of the substrate surface; Construction and technical performance of the system; Components of the spectrometer.
- Subjects :
- ION bombardment
SPECTROMETERS
PLASMA-enhanced chemical vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 70
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 2484352