Cite
Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures.
MLA
Giannazzo, F., et al. “Scanning Capacitance Microscopy: Quantitative Carrier Profiling down to Nanostructures.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 24, no. 1, Jan. 2006, pp. 370–74. EBSCOhost, https://doi.org/10.1116/1.2151907.
APA
Giannazzo, F., Raineri, V., Mirabella, S., Impellizzeri, G., Priolo, F., Fedele, M., & Mucciato, R. (2006). Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 24(1), 370–374. https://doi.org/10.1116/1.2151907
Chicago
Giannazzo, F., V. Raineri, S. Mirabella, G. Impellizzeri, F. Priolo, M. Fedele, and R. Mucciato. 2006. “Scanning Capacitance Microscopy: Quantitative Carrier Profiling down to Nanostructures.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 24 (1): 370–74. doi:10.1116/1.2151907.