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Si nanowires sheathed with thin diamondlike carbon films.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jul/Aug2006, Vol. 24 Issue 4, p1702-1704, 3p, 3 Black and White Photographs, 1 Graph
- Publication Year :
- 2006
-
Abstract
- Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. [ABSTRACT FROM AUTHOR]
- Subjects :
- ELECTROLESS plating
METALS
SILICON
NANOWIRES
CARBON
RAMAN spectroscopy
Subjects
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 24
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 23074186
- Full Text :
- https://doi.org/10.1116/1.2207155