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Si nanowires sheathed with thin diamondlike carbon films.

Authors :
Qiu, T.
Wu, X. L.
Yang, L. W.
Shen, P. N.
Zhang, Z. Y.
Siu, G. G.
Chu, Paul K.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jul/Aug2006, Vol. 24 Issue 4, p1702-1704, 3p, 3 Black and White Photographs, 1 Graph
Publication Year :
2006

Abstract

Via electroless metal deposition and industrial plasma technology, we have successfully synthesized unique composite silicon nanowire structures with diamondlike carbon (DLC) sheaths acting as inorganic passivation layers. We have also discussed their growth mechanism in terms of a self-organization process. The thickness of the DLC sheaths were quantified with Raman spectroscopy. The Raman analytical result is in good agreement with direct microstructure observations. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
10711023
Volume :
24
Issue :
4
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
23074186
Full Text :
https://doi.org/10.1116/1.2207155