Structural, Dielectric and Ferroelectric Properties of Mixed Texture PbZr 0.20 Ti 0.80 O 3 Thin Films Prepared by a Chemical Method.

Titanium-rich lead zirconate titanate compositions are very attractive for pyroelectric applications. Crystalline texture can result in significant thin film properties optimization. In contrast, preparation of textured films requires specific processing parameters. In this work, PbZr 0.20 Ti 0.80 O 3 -PZT20/80 thin films with a mixed (001)(100)/(111) texture on Pt(111)/Ti/SiO 2 /Si substrates were obtained through a chemical method by optimizing thermal treatment conditions. Pole figure exhibited a 6.5% texture for the (100) crystalline plane. Dielectric constant and dissipation values for textured PZT films at 100 kHz were 159 and 0.04, respectively. Remanent polarization and coercive field were 13 μC/cm 2 and 119 kV/cm, respectively. [ABSTRACT FROM AUTHOR]