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Multiscale simulation of silicon film growth.

Authors :
C. Cavallotti
E. Pantano
A. Veneroni
Source :
Crystal Research & Technology; Nov2005, Vol. 40 Issue 10/11, p958-963, 0p
Publication Year :
2005

Details

Language :
English
ISSN :
02321300
Volume :
40
Issue :
10/11
Database :
Complementary Index
Journal :
Crystal Research & Technology
Publication Type :
Academic Journal
Accession number :
20681749

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