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Low-Temperature Electron Mobility in Trigate SOI MOSFETs.

Authors :
Colinge, Jean-Pierre
Quinn, Aidan J.
Floyd, Liam
Redmond, Gareth
Alderman, John C.
Weize Xiong
Cleavelin, C. Rinn
Schulz, Thomas
Schruefer, Klaus
Knoblinger, Gerhard
Patruno, Paul
Source :
IEEE Electron Device Letters; Feb2006, Vol. 27 Issue 2, p120-122, 3p, 1 Diagram, 4 Graphs
Publication Year :
2006

Abstract

Evidence of one-dimensional subband formation is found at low temperature in trigate silicon-on-insulator MOSFETs, resulting in oscillations of the I<subscript>D</subscript>(V<subscript>G</subscript>) characteristics. These oscillations correspond to the filling of energy subbands by electrons as the gate voltage is increased. High mobility, reaching 1200 cm²/Vs, is measured in the subbands at T = 4.4 K. Subband mobility, decreases as temperature is increased. Conduction in subbands disappears for temperatures higher than 100 K or for drain voltage values that are significantly larger than kT/q. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
07413106
Volume :
27
Issue :
2
Database :
Complementary Index
Journal :
IEEE Electron Device Letters
Publication Type :
Academic Journal
Accession number :
19552462
Full Text :
https://doi.org/10.1109/LED.2005.862691